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This article reports the fine-tuning of the optical resonance wavelength (ORW) of surface-micromachined optical ultrasound transducer (SMOUT) arrays to enable ultrasound data readout with non-tunable interrogation light sources for photoacoustic computed tomography (PACT). Permanent ORW tuning is achieved by material deposition onto or subtraction from the top diaphragm of each element with sub-nanometer resolution. For demonstration, a SMOUT array is first fabricated, and its ORW is tuned for readout with an 808 nm laser diode (LD). Experiments are conducted to characterize the optical and acoustic performances of the elements within the center region of the SMOUT array. Two-dimensional and three-dimensional PACT (photoacoustic computed tomography) is also performed to evaluate the imaging performance of the ORW-tuned SMOUT array. The results show that the ORW tuning does not degrade the optical, acoustic, and overall imaging performances of the SMOUT elements. As a result, the fine-tuning method enables new SMOUT-based PACT systems that are low cost, compact, powerful, and even higher speed, with parallel readout capability. 

This Letter reports a new, to the best of our knowledge, high-frequency surface-micromachined optical ultrasound transducer (HF-SMOUT) array for micro photoacoustic computed tomography (µPACT). An 11 × 11 mm²2D array of 220 × 220 elements (35 µm in diameter) is designed, fabricated, and characterized. The optical resonance wavelength (ORW) of ≥90% of the elements falls within a 6-nm range. The acoustic center frequency and bandwidth of the elements are ∼14 MHz and ∼18 MHz (129%), respectively. The noise equivalent pressure (NEP) is 161 Pa (or 18 mPa/Hz) within a measurement bandwidth of 5–75 MHz. The standard deviation of the ORW drift is 0.45 nm and 0.93 nm within 25°C−55°C, respectively, and during a seven-day continuous water immersion. PACT experiments are conducted to evaluate the imaging performances of the HF-SMOUT array. The spatial resolution is estimated as 90 µm (axial) and 250–750 µm (lateral) within a 10 × 10 mm²field of view (FoV) and the imaging depth of 16 mm. A 3D PA image of a knotted black hair target is also successfully acquired. These results demonstrate the feasibility of using the HF-SMOUT array for µPACT applications.